Cost of MEMS Test


What used to be a technology driven by high-end automotive and medical applications has become a true commodity: MEMS. Any state of the art electronic gadget – be it a mobile phone, a tablet or a camera – makes extensive use of MEMS components.

Gyroscopes, Accelerometers, pressure senors, magnetometers, microphones and other devices have to be manufactured, calibrated and fully tested at the lowest possible cost. Cost of Calibration and Test (COCT) is now the single most significant cost factor for a majority of MEMS sensors particulary in consumer applications. At the same time, many safety and health related MEMS applications remain extremely demanding on device reliability. Therefore precise device calibration and rigorous testing continue to be critical requirements.

The presentation specifically addresses the various approaches to reduce COCT for MEMS with a focus on so called “combo-sensors” which combine more than one MEMS device in a single package. The main COCT drivers such as the stimulus equipment, its high throughput capability, its uptime, short test time, the test equipment itself and the level of test parallelism are being identified and analyzed. A specific MEMS test cell enabling high parallel test while maintaining flexibility with regards to package size (>2mm) and stimulus is being described in Detail.

The author describe and analyze the situation from both – the semiconductor manufacture‘s and equipment supplier‘s perspective – and also lay out a future roadmap as to where MEMS calibration and test technology is headed.

Version: September 2013
Presented by: Dr. Reinhart Richter
Presented at: Semicon Taiwan