MEMS Fusion – Challenges in Final Test


Sensors and MEMS applications are drastically increasing. Almost any area of today’s lives uses their advantages. In general this has two implications:

Especially for applications in the medical and automotive segment, 100% reliability is a must. Additionally, sensors face the issue of being considered a disposable commodity. Whereas reliability directly requires QA, the second issue increases the cost pressure. Solutions for cost-effective and reliable final test need to be developed. This is particularly true for more than one sensor within one package.

This paper will analyze typical test strategies with regards to their equipment requirements, reliability and safety and cost-effectiveness. Finally, a framework for the decision about the optimum sensor test setup will be developed.

Version: September 2012
Presented by: Andreas Bursian
Presented at: SEMICON Taiwan