“Taking MEMS test and calibration to the next level ” – An integrated platform approach driving further MEMS growh


What used to be a technology driven by high-end automotive and medical applications has become a true commodity: MEMS. Any state of the art electronic gadget – be it a mobile phone, a tablet or a camera – makes extensive use of MEMS components.

Gyroscopes, Accelerometers, pressure sensors, magnetometers, microphones and other devices have to be manufactured, calibrated and fully tested at the lowest possible cost.

Cost of Calibration and Test (COCT) is now a significant cost factor for a majority of MEMS sensors particularly in consumer applications. At the same time, many safety and health related MEMS applications remain extremely demanding with respect to device reliability and therefore precise device calibration and rigorous testing continue to be critical requirements. Concepts are needed to provide economic solutions for both – high volumes with standard specs and low volumes with strict quality requirements.

The author describes and analyzes the situation for both – low volume/ high ASP and high volume/low ASP applications on the other Hand.

Various approaches to reduce Cost of Test for MEMS with a focus on test cell integration will be discussed.  The main COCT drivers such as the stimulus equipment, its high throughput capability, its uptime, short test time, the test equipment itself and the level of test parallelism are being identified and analyzed.  He will compare various concepts and lay out future requirements as to where MEMS calibration and test technology is headed.

Version: March 2015
Presented by: John Rychcik
Presented at: BiTS